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YSBZ6000真空(kong)(kong)(kong)度測試儀均采(cai)用基于電(dian)(dian)(dian)離電(dian)(dian)(dian)荷的(de)(de)采(cai)樣(yang)技(ji)術。在磁控放電(dian)(dian)(dian)的(de)(de)研究(jiu)中發(fa)現：在外激勵電(dian)(dian)(dian)源、真空(kong)(kong)(kong)滅(mie)弧(hu)室的(de)(de)幾何尺(chi)寸、所用材料一定(ding)時(shi)，真空(kong)(kong)(kong)滅(mie)弧(hu)室內的(de)(de)真空(kong)(kong)(kong)度與(yu)(yu)電(dian)(dian)(dian)離的(de)(de)電(dian)(dian)(dian)荷量有(you)非常準確(que)的(de)(de)對應關(guan)系(xi)，而與(yu)(yu)電(dian)(dian)(dian)離電(dian)(dian)(dian)流的(de)(de)峰值(zhi)僅有(you)概率上的(de)(de)相關(guan)間接關(guan)系(xi)。因(yin)此(ci)，開發(fa)了(le)基于電(dian)(dian)(dian)離電(dian)(dian)(dian)荷的(de)(de)采(cai)樣(yang)技(ji)術，顯著提高了(le)真空(kong)(kong)(kong)滅(mie)弧(hu)室的(de)(de)真空(kong)(kong)(kong)度計量的(de)(de)準確(que)性。